{"title":"A Novel Heatuator","authors":"R. Dhote, S. Chiluveru, S. Chandorkar, P. Apte","doi":"10.1142/S1465876303001915","DOIUrl":null,"url":null,"abstract":"MEMS based heatuators are being used extensively for actuation purpose. The conventional heatuators have different arm widths while this paper proposes a variant design that has equal widths but unequal resistances. The new design brings in the advantages of faster response and greater deflections for similar condition. The heatuators have been simulated using the coupled-fied element SOLID98 of the finite element analysis software ANSYS.","PeriodicalId":331001,"journal":{"name":"Int. J. Comput. Eng. Sci.","volume":"27 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2003-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Int. J. Comput. Eng. Sci.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1142/S1465876303001915","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
MEMS based heatuators are being used extensively for actuation purpose. The conventional heatuators have different arm widths while this paper proposes a variant design that has equal widths but unequal resistances. The new design brings in the advantages of faster response and greater deflections for similar condition. The heatuators have been simulated using the coupled-fied element SOLID98 of the finite element analysis software ANSYS.
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