New SAW Velocity Measurements on Y-Cut LiNbO3

M. Anhorn, H. Engan, A. Rønnekleiv
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引用次数: 25

Abstract

Recent measiirements on SAW velocities are reported. The results are based on scanning of a laser probe across the propagation beam at certain intervals. Previously reported measurements on YZ LiNb03 have been extended to include the complete Y surface. For t.his orientation, results for both a free surface and a metallized surface are reported. A noticeable digference has been found between the beam steering properties of free and met.alized surface around Z propagation direction. Effects from va r i a t ion (I) f me t a 1 1 i z a t i on t h i c kne s s have been studied also and are presented. Many SAW devices use parallel metal strips on the substrate surface. Measurements on the angular variation of SAW velocities in such st.ructiires are reported.
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y形切割LiNbO3的SAW速度测量新方法
报告了最近对SAW速度的测量结果。结果是基于激光探头在一定间隔内扫描传输光束。先前报道的对YZ LiNb03的测量已经扩展到包括完整的Y表面。对于这种取向,报告了自由表面和金属化表面的结果。在自由和满足的光束导向特性之间发现了明显的差异。沿Z传播方向的化面。本文还研究并介绍了不同浓度的水对水的影响,并给出了不同浓度水对水的影响。许多SAW器件在衬底表面使用平行金属条。报道了在这种结构中声表面波速度角变化的测量结果。
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