{"title":"Finite Element Analysis and Fabrication of a 3 MHz Megasonic System for Semiconductor Cleaning","authors":"Hyunse Kim, Euisu Lim, Y. Lee","doi":"10.7735/ksmte.2022.31.3.147","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":344634,"journal":{"name":"Journal of the Korean Society of Manufacturing Technology Engineers","volume":"17 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-06-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of the Korean Society of Manufacturing Technology Engineers","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.7735/ksmte.2022.31.3.147","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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