MCT epitaxial layers characterization from IR transmittance spectra

K. Boltar, N. I. Yakovleva
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Abstract

Transmittance spectra of epitaxial layers grown on the basis of mercury and cadmium telluride (MCT) alloys have been measured within the wavelength number range of (5000 cm-1<ν<500 cm-1). P-type epitaxial layers were grown both by liquid-phase epitaxy method (LPE) on CdZnTe substrates and molecular-beam epitaxy (MBE) on GaAs substrates. The MCT layer parameters such as epitaxial layer thickness d, cutoff wavelength λ05, composition x were calculated from the spectra. JR transmittance spectra simulation method was developed to determine the semiconductor multilayer structures characteristics. Fourier Transform (FT) method was suggested to determine the thickness of MCT epitaxial layers.
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红外透射光谱表征MCT外延层
在(5000 cm-1<ν<500 cm-1)波长范围内测量了汞和碲化镉合金外延层的透射光谱。采用液相外延法(LPE)和分子束外延法(MBE)分别在CdZnTe衬底和GaAs衬底上生长p型外延层。根据光谱计算出MCT的外延层厚度d、截止波长λ05、成分x等参数。为了确定半导体多层结构的特性,提出了JR透射光谱模拟方法。提出了用傅里叶变换(FT)法确定MCT外延层厚度的方法。
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