{"title":"Photo patterned thick-film resonators","authors":"B. Dziurdzia, S. Nowak, W. Gregorczyk, M. Ciez","doi":"10.1109/MIKON.2002.1017889","DOIUrl":null,"url":null,"abstract":"Microwave circuit demands for high resolution patterning, rectangular cross-sections, sharp edges and smooth surfaces are met by the photo-imageable thick-film technology, successfully competing with traditional screen printing. This paper presents parameters of photosensitive pastes, describes the exposure and development units necessary for carrying out the photoimaging process, depicts manufacturing steps that lead to forming microwave structures with parameters comparable to thin film ones. Edge-coupled filters of centre frequency 6, 12 and 14 GHz, built with microstrip resonators, are the test samples. The transmission and reflection characteristics of filters are measured using a vector network analyser and compared to the simulated characteristics.","PeriodicalId":372054,"journal":{"name":"14th International Conference on Microwaves, Radar and Wireless Communications. MIKON - 2002. Conference Proceedings (IEEE Cat.No.02EX562)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2002-08-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"14th International Conference on Microwaves, Radar and Wireless Communications. MIKON - 2002. Conference Proceedings (IEEE Cat.No.02EX562)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MIKON.2002.1017889","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1

Abstract

Microwave circuit demands for high resolution patterning, rectangular cross-sections, sharp edges and smooth surfaces are met by the photo-imageable thick-film technology, successfully competing with traditional screen printing. This paper presents parameters of photosensitive pastes, describes the exposure and development units necessary for carrying out the photoimaging process, depicts manufacturing steps that lead to forming microwave structures with parameters comparable to thin film ones. Edge-coupled filters of centre frequency 6, 12 and 14 GHz, built with microstrip resonators, are the test samples. The transmission and reflection characteristics of filters are measured using a vector network analyser and compared to the simulated characteristics.
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照片图案化厚膜谐振器
微波电路对高分辨率图案、矩形截面、锐利边缘和光滑表面的要求通过可成像厚膜技术得到满足,成功地与传统的丝网印刷竞争。本文介绍了光敏浆料的参数,描述了进行光敏成像过程所需的曝光和显影单元,描述了形成具有与薄膜相当参数的微波结构的制造步骤。采用微带谐振器构建的中心频率为6、12和14 GHz的边缘耦合滤波器为测试样本。利用矢量网络分析仪测量了滤波器的传输和反射特性,并与仿真特性进行了比较。
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