Seungsu Lee, Seungsoo Hong, Jeongkyun Na, Hansol Kim, Y. Jeong
{"title":"Glass Substrate Inspection Using Swept-Source Optical Coherence Tomography","authors":"Seungsu Lee, Seungsoo Hong, Jeongkyun Na, Hansol Kim, Y. Jeong","doi":"10.1364/FTS.2019.JTH2A.24","DOIUrl":null,"url":null,"abstract":"We demonstrate a novel industrial application of optical coherence tomography (OCT) for glass substrate inspection. For high resolution and high speed OCT measurements, we developed an all-fiberized Fourier-domain mode locking swept source with broad bandwidth and high sweeping speed as the light source for the OCT system. With this, we successfully measured multiple layers of glass substrate.","PeriodicalId":174423,"journal":{"name":"Optical Sensors and Sensing Congress (ES, FTS, HISE, Sensors)","volume":"27 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-06-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optical Sensors and Sensing Congress (ES, FTS, HISE, Sensors)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/FTS.2019.JTH2A.24","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
We demonstrate a novel industrial application of optical coherence tomography (OCT) for glass substrate inspection. For high resolution and high speed OCT measurements, we developed an all-fiberized Fourier-domain mode locking swept source with broad bandwidth and high sweeping speed as the light source for the OCT system. With this, we successfully measured multiple layers of glass substrate.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
