P. Gornostaev, Viacheslav K. Samojlikov, Maxim S. Golovinskiy, S. Evstafyev
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Abstract
Methods and devices used in the manufacture of electronic products for determining the thermal state of substrates are discussed. The methods were evaluated according to a number of criteria important for temperature measurements: performance, noise immunity, sensitivity, temperature range of measurements. Original devices and methods for measuring the operating temperature of substrates in vacuum-plasma processes have been developed.
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