Zhihua Yong, Tao Liu, Xingyu Gao, Lei Yan, C. Ong, A. Wee
{"title":"EFFECTS OF Ar+ SPUTTERING ON VALENCE STATE AND CHEMICAL ENVIRONMENT OF COBALT IN COBALT-DOPED ZINC OXIDE","authors":"Zhihua Yong, Tao Liu, Xingyu Gao, Lei Yan, C. Ong, A. Wee","doi":"10.1142/S1793617908000136","DOIUrl":null,"url":null,"abstract":"Zn1-xCoxAl0.01O (x = 0, 0.15, 0.2, 0.3) films were fabricated on Si(100) substrates by pulsed laser deposition (PLD). X-ray diffraction (XRD) studies showed that the Co-doped ZnO films are polycrystalline with c-axis orientated wurtzite structure. Photoemission revealed a valence state of 2+ and a tetrahedral coordination of Co in the Co-doped ZnO. Ar+ sputtering was performed to investigate the changes to the valence state and the chemical environment of Co at surface and bulk. After Ar+ sputtering, the film composition was found to be closer to the starting target material. This was confirmed by the results of X-ray fluorescence (XRF) measurements, indicating the Co-doped ZnO film surface is cobalt-rich.","PeriodicalId":166807,"journal":{"name":"Advances in Synchrotron Radiation","volume":"3 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2008-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Advances in Synchrotron Radiation","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1142/S1793617908000136","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Zn1-xCoxAl0.01O (x = 0, 0.15, 0.2, 0.3) films were fabricated on Si(100) substrates by pulsed laser deposition (PLD). X-ray diffraction (XRD) studies showed that the Co-doped ZnO films are polycrystalline with c-axis orientated wurtzite structure. Photoemission revealed a valence state of 2+ and a tetrahedral coordination of Co in the Co-doped ZnO. Ar+ sputtering was performed to investigate the changes to the valence state and the chemical environment of Co at surface and bulk. After Ar+ sputtering, the film composition was found to be closer to the starting target material. This was confirmed by the results of X-ray fluorescence (XRF) measurements, indicating the Co-doped ZnO film surface is cobalt-rich.
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