Modeling and simulation of tunable band-pass filter based on metal-mumps

Abstract

This paper presents a tunable Radio Frequency Micro Electromechanical Systems (RF-MEMS) coupled band-pass filter (BPF) with wide tuning range based on the Chebyshev fourth degree equivalent circuit using inter-digitized tunable capacitors, and fixed inductors. A new tunable BPF with a 100% tuning range from 3.1 to 4.9 GHz has been designed and simulated to verify the proposed method. The band-pass filter was fabricated using Metal Multi-User MEMS Process (MUMPs) process. The objective is to understand reconfigurable frequencies and attain high RF performance for Ultra Wide Band (UWB) application such as in wireless sensor network. The filter displayed good RF performance because of its simple fabrication, less insertion loss around 4 dB and high return loss of around 20 dB.