W. Skorupa, M. Voelskow, R. Grötzschel, J. Albrecht, Jan Vanhellemonta, A. De Veirman
{"title":"OPTIMIZED SO I-PROCESS I NB BY ION BEAM SYNTHESIS OF BURIED SILICON OXYNITRIDE IN SILICON","authors":"W. Skorupa, M. Voelskow, R. Grötzschel, J. Albrecht, Jan Vanhellemonta, A. De Veirman","doi":"10.1515/9783112575666-104","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":432951,"journal":{"name":"EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR","volume":"44 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1989-12-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1515/9783112575666-104","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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