A robust extended Kalman filter for modeling piezoelectric actuators

N. Chuang
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Abstract

This paper presents an improved hysteretic model for a piezoelectric actuator (PEA) based nano-positioning system. PEAs exhibit hysteresis nonlinearities, which can dramatically limit control performance and accuracy of the nano-positioning system. The paper provides a design of a hysteretic nonlinearity estimator using a robust extended Kalman filter to determine the best estimate for the hysteresis model. A good quality and an accurate level of the model is an important task and a prerequisite that may significantly affect the control performance in nano-positioning systems even using an advanced controller. With the respect to the hysteresis model considered in [1], the proposed approach in this paper demonstrates a significant improvement to have perfectly matched the experimental data of the measured hysteresis curve of the displacement by comparing the one presented in [1].
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用于压电致动器建模的鲁棒扩展卡尔曼滤波器
提出了一种改进的压电致动器纳米定位系统的滞后模型。豌豆具有非线性滞后特性,严重影响了纳米定位系统的控制性能和精度。本文提出了一种利用鲁棒扩展卡尔曼滤波的滞回非线性估计器的设计,以确定滞回模型的最佳估计。在采用先进控制器的纳米定位系统中,良好的模型质量和精度水平是影响控制性能的重要前提。相对于[1]中所考虑的迟滞模型,本文所提出的方法与[1]中的方法相比有了显著的改进,可以很好地匹配位移迟滞曲线实测的实验数据。
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