T. Kailath, C. Schaper, Y. Cho, P. Gyugyi, S. A. Norman, P. Park, S. Boyd, G. Franklin, K. Saraswat, M. Moslehi, C. Davis
{"title":"Control for Advanced Semiconductor Device Manufacturing: A Case History","authors":"T. Kailath, C. Schaper, Y. Cho, P. Gyugyi, S. A. Norman, P. Park, S. Boyd, G. Franklin, K. Saraswat, M. Moslehi, C. Davis","doi":"10.1201/9781315214061-5","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":167142,"journal":{"name":"Control System Applications","volume":"8 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-10-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Control System Applications","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1201/9781315214061-5","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}