Diagnostics of the laser deposition process by optical methods

Abstract

We use optical methods for in-situ diagnostics in pulsed laser deposition of high temperature superconductive thin films. Our interest is focused on the composition modifications experienced by the plume of ablated material during its expansion from the target to the substrate in a molecular oxygen environment, which constitute a key point for the attainment of the correct film stoichiometry. Our diagnostics, based on absorption spectroscopy of atomic oxygen, provide a reliable tool for accurate analysis of the molecular oxygen dissociation involved in the reactive- collisional processes.