C. Ho, Prakash Pitchappa, Yu‐Sheng Lin, Chengkuo Lee
{"title":"Electrothermally actuated MEMS terahertz metamaterial","authors":"C. Ho, Prakash Pitchappa, Yu‐Sheng Lin, Chengkuo Lee","doi":"10.1109/OMN.2014.6924588","DOIUrl":null,"url":null,"abstract":"We present the design, simulation, fabrication and characterization of a continuously tunable Omega-ring teratahertz metamaterial. The tunability of metamaterial is obtained by integrating electrothermal actuator where higher tuning range, larger stroke and enhanced repeatability are possible. The maximum achieved tuning range for the resonant frequency is around 0.30 THz for the input power of 500 mW.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"179 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2014 International Conference on Optical MEMS and Nanophotonics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMN.2014.6924588","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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Abstract
We present the design, simulation, fabrication and characterization of a continuously tunable Omega-ring teratahertz metamaterial. The tunability of metamaterial is obtained by integrating electrothermal actuator where higher tuning range, larger stroke and enhanced repeatability are possible. The maximum achieved tuning range for the resonant frequency is around 0.30 THz for the input power of 500 mW.
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