Directional effect and surface features of silicon nitride ceramics by laser spot ablation and microgrooving

Sixteenth National Conference on Laser Technology and Optoelectronics Pub Date : 2021-08-31 DOI:10.1117/12.2603271

Guiying Ma, Xiaoxiao Chen, Yang Liu, Huihui Zhang, Wenwu Zhang

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引用次数: 0

Abstract

Due to excellent properties such as high hardness, high temperature resistance, corrosion resistance and low thermal conductivity, siliconnitrideceramicsare widely used in aerospace, moldand semiconductor fields. This paper studied the material removal characteristics of fixedpoint laser ablation and microgrooving of silicon nitride ceramics in the cross-coupling energy domain after laser beam splitting and combining. When using nanosecond laser for fixed point ablation, the effect of defocus on the surface characteristics of laser ablation was analyzed. When processing surface microgrooves in different directions, the influence of the directional effect of the spatial characteristics of the coupled energy domain on the processing quality was studied. By test and analysis of the surface morphology characteristics of silicon nitride ceramics, the results show thatthe change of the defocus affects the processing depthwhen a fixed point is ablatedin the cross-coupling energy domain. Thedirection effect of microgroove processing has a more significant effect on the surface characteristics.

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激光点烧蚀和微沟槽制备氮化硅陶瓷的定向效应和表面特征

氮化硅陶瓷具有硬度高、耐高温、耐腐蚀、导热系数低等优异性能，广泛应用于航空航天、模具、半导体等领域。研究了氮化硅陶瓷的定点激光烧蚀和微沟槽在交叉耦合能量域中经过激光束分裂和结合后的材料去除特性。利用纳秒激光进行定点烧蚀时，分析了离焦对激光烧蚀表面特性的影响。在不同方向加工表面微槽时，研究了耦合能域空间特性的方向效应对加工质量的影响。通过对氮化硅陶瓷表面形貌特征的测试和分析，结果表明，在交叉耦合能域中烧蚀固定点时，离焦的变化会影响加工深度。微槽加工的方向效应对表面特性的影响更为显著。

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Sixteenth National Conference on Laser Technology and Optoelectronics

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