E. Ozawa, Y. Kawakami, Toshinobu Yoshida, M. Iwashina, Kazutoshi Takahashi
{"title":"Characteristics of electric devices made by direct nanoparticle spraying","authors":"E. Ozawa, Y. Kawakami, Toshinobu Yoshida, M. Iwashina, Kazutoshi Takahashi","doi":"10.1117/12.486523","DOIUrl":null,"url":null,"abstract":"Metal nanoparticles films were prepared by a gas deposition technique couple with the nanosecond pulsed Nd:YAG laser ablation of two kinds of metal targets. Two generated nanoparticles were insitu mixed in the near space of the targets in the generation chamber and transported by a helium carrier gas to the deposition chamber and deposited on a substrate to form electric devices such as a resistor, a capacitor, wiring, etc., composed of nanoparticles composites. The electrical resistivity and capacity of the devices were measured. The relationship between the experimental conditions such as ambient pressure and laser fluences and the electrical properties of each device were analyzed. A heater was produced as an example of the application of a resistor.","PeriodicalId":159280,"journal":{"name":"International Congress on Laser Advanced Materials Processing","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2003-02-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Congress on Laser Advanced Materials Processing","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.486523","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Metal nanoparticles films were prepared by a gas deposition technique couple with the nanosecond pulsed Nd:YAG laser ablation of two kinds of metal targets. Two generated nanoparticles were insitu mixed in the near space of the targets in the generation chamber and transported by a helium carrier gas to the deposition chamber and deposited on a substrate to form electric devices such as a resistor, a capacitor, wiring, etc., composed of nanoparticles composites. The electrical resistivity and capacity of the devices were measured. The relationship between the experimental conditions such as ambient pressure and laser fluences and the electrical properties of each device were analyzed. A heater was produced as an example of the application of a resistor.
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