{"title":"Focus-Induced Photoresponse in Amorphous Silicon Photodetectors for low-light and sub-mm resolution 3D Imaging Applications","authors":"M. Müller, A. Bablich, R. Bornemann, P. Bolívar","doi":"10.1109/IPC53466.2022.9975479","DOIUrl":null,"url":null,"abstract":"We report the Focus-Induced Photoresponse (FIP) in amorphous silicon photodiodes as a key enabler for future high performance 3D imaging systems. The sensors achieve $\\sim 540 \\mu \\mathrm{m}$ depth resolution at ~55 cm, 60 dB signal-to-noise ratio at 1.4 MHz modulation frequency and sensitivities below $0.036 \\mu \\mathrm{W}$/mm2.","PeriodicalId":202839,"journal":{"name":"2022 IEEE Photonics Conference (IPC)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2022 IEEE Photonics Conference (IPC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IPC53466.2022.9975479","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
We report the Focus-Induced Photoresponse (FIP) in amorphous silicon photodiodes as a key enabler for future high performance 3D imaging systems. The sensors achieve $\sim 540 \mu \mathrm{m}$ depth resolution at ~55 cm, 60 dB signal-to-noise ratio at 1.4 MHz modulation frequency and sensitivities below $0.036 \mu \mathrm{W}$/mm2.
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