{"title":"Optimizing the Deposition of Sputtered Gold Island Films with Time Derivative Surface Reflectance","authors":"A. Riera, B. Baloukas, O. Zabeida, L. Martinu","doi":"10.1364/OIC.2019.TA.9","DOIUrl":null,"url":null,"abstract":"Analysis of the in situ reflectance spectra during sputtering of gold allows for the characterization of different growth regimes throughout the deposition. The validity of this method is assessed and discussed.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"15 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optical Interference Coatings Conference (OIC) 2019","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/OIC.2019.TA.9","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Analysis of the in situ reflectance spectra during sputtering of gold allows for the characterization of different growth regimes throughout the deposition. The validity of this method is assessed and discussed.
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