{"title":"Nanoscopic Hardness Measurement by Atomic Force Microscope","authors":"N. Nagashima, S. Matsuoka, K. Miyahara","doi":"10.1299/JSMEA1993.39.3_456","DOIUrl":null,"url":null,"abstract":"Atomic force microscopes (AFMs) can be used for atomic-scale imaging and nanofabrication. Taking advantage of this we developed a nanoindentation technique. Hardness measurements were carried out on cementite-spheroidized S 25 C carbon steel (Vickers hardness H v ,= 128) and 400°C-tempered SNCM 439 low alloy steel (H v = 414), using a cantilever with a three-sided pyramidal diamond tip. The depth of indentations created was between 14 and 330 nm. The difference in hardness between S 25 C and SNCM 439 steels was detected in the nanoscopic region. From these results, it was concluded that nanoindentation was realized with AFM.","PeriodicalId":143127,"journal":{"name":"JSME international journal. Series A, mechanics and material engineering","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"1996-07-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"17","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"JSME international journal. Series A, mechanics and material engineering","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1299/JSMEA1993.39.3_456","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 17
Abstract
Atomic force microscopes (AFMs) can be used for atomic-scale imaging and nanofabrication. Taking advantage of this we developed a nanoindentation technique. Hardness measurements were carried out on cementite-spheroidized S 25 C carbon steel (Vickers hardness H v ,= 128) and 400°C-tempered SNCM 439 low alloy steel (H v = 414), using a cantilever with a three-sided pyramidal diamond tip. The depth of indentations created was between 14 and 330 nm. The difference in hardness between S 25 C and SNCM 439 steels was detected in the nanoscopic region. From these results, it was concluded that nanoindentation was realized with AFM.
原子力显微镜(AFMs)可用于原子尺度成像和纳米制造。利用这一点，我们开发了一种纳米压痕技术。采用三面锥体金刚石尖悬臂梁对渗碳球化的s25c碳钢(维氏硬度H v = 128)和400℃回火的SNCM 439低合金钢(H v = 414)进行了硬度测量。产生的压痕深度在14到330 nm之间。s25c钢和SNCM 439钢的硬度在纳米尺度上存在差异。结果表明，利用原子力显微镜可以实现纳米压痕。
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