{"title":"Laser-induced deposition and etching of tungsten microstructures","authors":"K. Piglmayer, H. Schieche, R. Chabicovsky","doi":"10.1117/12.316606","DOIUrl":null,"url":null,"abstract":"Micron-sized deposition and etching of W in WF6 + H2 atmosphere is investigated by local laser-induced heating of thin tungsten layers on quartz substrates. The process is strongly dependent on the partial pressures of the two gases. A process with high amount of hydrogen permits deposition of W, whereas etching of W occurs if the working gas does not contain hydrogen.","PeriodicalId":373160,"journal":{"name":"GR-I International Conference on New Laser Technologies and Applications","volume":"5 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1998-07-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"GR-I International Conference on New Laser Technologies and Applications","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.316606","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
Micron-sized deposition and etching of W in WF6 + H2 atmosphere is investigated by local laser-induced heating of thin tungsten layers on quartz substrates. The process is strongly dependent on the partial pressures of the two gases. A process with high amount of hydrogen permits deposition of W, whereas etching of W occurs if the working gas does not contain hydrogen.
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