Stephan R. Clark, Michael B. North-Morris, J. Greivenkamp
{"title":"Stylus Profilometer with an Optical Reference","authors":"Stephan R. Clark, Michael B. North-Morris, J. Greivenkamp","doi":"10.1364/oft.1998.owb.2","DOIUrl":null,"url":null,"abstract":"Three-dimensional or x-y-z stylus profilometers are a well-established method for measuring non-rotationally symmetric aspheric surfaces.1 In this paper, the design of a three-dimensional stylus profilometer that uses an optical reference surface is presented. The benefits of using this reference structure are also discussed.","PeriodicalId":354934,"journal":{"name":"Optical Fabrication and Testing","volume":"37 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optical Fabrication and Testing","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/oft.1998.owb.2","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
Three-dimensional or x-y-z stylus profilometers are a well-established method for measuring non-rotationally symmetric aspheric surfaces.1 In this paper, the design of a three-dimensional stylus profilometer that uses an optical reference surface is presented. The benefits of using this reference structure are also discussed.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
