Analyses of strips metallization effect on the delay time of integrated circuit elements

Abstract

The quasi-static parameters of planar lossless multiconductor transmission line systems are computed using the semianalytical method of lines with nonequidistant discretization. The effect of metallization thickness on the capacitance and inductance matrices of one, two, and five strips in a two-layer dielectric medium is taken into account. The propagation delay which is related to the inductance and capacitance matrices of these structures is considerably affected by the metallization thickness of the conductor strips. The relative variations of this time delay with respect to zero thickness approximation time delay for the structures studied reach about 20% for t/w of 30%.<>