Simple and Powerful encapsulation through Hybrid Packaging for Electrochemical Transducers

M. Steinmaßl, J. Boudaden, W. Hell, C. Kutter
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引用次数: 1

Abstract

We present a simple and reliable hybrid packaging of rigid electrochemical transducers and flexible foil having electrical connections. Among a large number of biochemical transducers, we target in this work two types of transducers: 3-electrode systems and ion selective field effect transistors (ISFET). The hybrid packaging ensures several requirements such as: biocompatibility to biological analytes, precise tight encapsulation, protection of transducers surface, mechanical stability, reliable electrical contact and light shielding of sensitive parts. The proposed hybrid packaging of biochemical transducers is based on a flip-chip bonding process, which necessitates low-cost materials, a reduced number of processing steps as well as compatibility to common roll-to-roll (R2R) processes.
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电化学换能器的混合封装简单而强大
我们提出了一种简单可靠的刚性电化学换能器和具有电连接的柔性箔的混合封装。在众多的生化换能器中,我们针对两种类型的换能器:三电极系统和离子选择场效应晶体管(ISFET)。混合封装确保了几个要求,如:对生物分析物的生物相容性,精确严密的封装,传感器表面的保护,机械稳定性,可靠的电接触和敏感部件的光屏蔽。提出的生物化学传感器的混合封装基于倒装芯片键合工艺,这需要低成本的材料,减少处理步骤的数量以及与常见的卷对卷(R2R)工艺的兼容性。
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