Experimental study of boric acid diffused emitters for n-type c-Si solar cells

B. Singha, C. Solanki
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引用次数: 2

Abstract

In this work, boric acid powder solution has been used as a dopant source for optimizing emitter sheet resistance values corresponding to temperature range 850°-900°C. High purity (99.999%), non-toxic and low-cost boron diffusion is found to be suitable for p or p+ emitters with minimum diffusion-induced defects. Formation of a boron-rich layer, which is considered as a major problem in B-diffusion is eliminated with introduction of controlled process steps. An increase of effective minority carrier lifetime is observed after the diffusion process. The measured Sun's Voc and Implied Voc for sheet resistances less than 100Ω/sq is in the range of 570-600 mV, without any optics-improving techniques, for Czochralski n-type c-Si wafers. This indicates the suitability of the use of boric acid as the dopant source for emitter formation in n-type c-Si solar cells.
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n型c-Si太阳能电池用硼酸扩散发射体的实验研究
在这项工作中,硼酸粉末溶液被用作掺杂源,以优化对应于850°-900°C温度范围的发射极片电阻值。高纯度(99.999%)、无毒和低成本的硼扩散材料适用于p或p+发射体,且扩散缺陷最小。富硼层的形成被认为是b扩散的主要问题,通过引入可控的工艺步骤消除了这一问题。扩散过程后,有效少数载流子寿命增加。对于Czochralski n型c-Si晶圆,在没有任何光学改进技术的情况下,测量的太阳Voc和隐含Voc在570-600 mV范围内,片电阻小于100Ω/sq。这表明硼酸作为n型c-Si太阳能电池中形成发射极的掺杂源是合适的。
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