{"title":"Interference device for roughness measurement","authors":"P. Maksimyak, O. Angelsky","doi":"10.1109/CLEOE.2000.910141","DOIUrl":null,"url":null,"abstract":"Summary form only given. We propose an interference method based on a shearing polarisation interferometer for measuring surface roughness. It is based on the RPS approach, which preassumes: (i) infinitely extended object (all spatial frequency components of the radiation scattered by the object are present in registration zone); (ii) phase variance of the object is small; (iii) the correlation length of the inhomogeneity is larger than the wavelength.","PeriodicalId":250878,"journal":{"name":"Conference Digest. 2000 Conference on Lasers and Electro-Optics Europe (Cat. No.00TH8505)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-09-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Conference Digest. 2000 Conference on Lasers and Electro-Optics Europe (Cat. No.00TH8505)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/CLEOE.2000.910141","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Summary form only given. We propose an interference method based on a shearing polarisation interferometer for measuring surface roughness. It is based on the RPS approach, which preassumes: (i) infinitely extended object (all spatial frequency components of the radiation scattered by the object are present in registration zone); (ii) phase variance of the object is small; (iii) the correlation length of the inhomogeneity is larger than the wavelength.
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