{"title":"Study of a 3D-printed Monolithic Compliant Tip-tilt-z Stage for Micro-alignment","authors":"Huaxian Wei, Jian Yang, Yuanchao Li, Zhouwu Chen","doi":"10.1109/3M-NANO56083.2022.9941606","DOIUrl":null,"url":null,"abstract":"Tip-tilt-z micro-positioning is crucial in wafer alignment. Due to the restrain of traditional manufacturing technique, it is hard to development compliant tip-tilt-z (CTTZ) mechanism in the form of single-piece monolithic structure. This paper presents the design, fabrication, and experimental tests of a CTTZ stage with monolithic spatial structure based on additive manufacturing (3D printing). The results verified the feasibility of developing complex compliant mechanism with spatial, compact, and monolithic structure, which could realize precision capability up to submicron and micro-radian using easy-access 3D-printing.","PeriodicalId":370631,"journal":{"name":"2022 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"24 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-08-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2022 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/3M-NANO56083.2022.9941606","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
Tip-tilt-z micro-positioning is crucial in wafer alignment. Due to the restrain of traditional manufacturing technique, it is hard to development compliant tip-tilt-z (CTTZ) mechanism in the form of single-piece monolithic structure. This paper presents the design, fabrication, and experimental tests of a CTTZ stage with monolithic spatial structure based on additive manufacturing (3D printing). The results verified the feasibility of developing complex compliant mechanism with spatial, compact, and monolithic structure, which could realize precision capability up to submicron and micro-radian using easy-access 3D-printing.
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