{"title":"Measurement of surface roughness of optical disk substrates by differential polarization interferometry","authors":"Wendong Xu, Xishan Li","doi":"10.1117/12.150655","DOIUrl":null,"url":null,"abstract":"This paper proposes a new interferometer to measure the roughness of optical disk substrates, which applies the principle of shearing interferometry and uses a Faraday modulator to detect the phase between two polarized beams. The instrument can produce surface probe and other statistical data with a height sensitivity of 2 nm and a lateral resolution of 1.2 micrometers . It has excellent stability even under vibration conditions, and rapid and noncontact measurements can be made without a special reference surface.","PeriodicalId":212484,"journal":{"name":"Optical Storage and Information Data Storage","volume":"11 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1993-08-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optical Storage and Information Data Storage","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.150655","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
This paper proposes a new interferometer to measure the roughness of optical disk substrates, which applies the principle of shearing interferometry and uses a Faraday modulator to detect the phase between two polarized beams. The instrument can produce surface probe and other statistical data with a height sensitivity of 2 nm and a lateral resolution of 1.2 micrometers . It has excellent stability even under vibration conditions, and rapid and noncontact measurements can be made without a special reference surface.