{"title":"Study of a sensor based on the series of micro-rings with dual coupling points","authors":"Xin Li, Shi‐Liang Guo, Ruiqi Piao, Ming Yang","doi":"10.1117/12.2179267","DOIUrl":null,"url":null,"abstract":"A novel type of humidity sensor based on the series of micro-rings with the same radius is proposed, and the humidity is measured by detecting the spectrum drift. Experimental results show the sensitivity can achieve about 16pm/10%RH and the sensing range of the humidity sensor is 10~60%RH. The proposed structure will provide an effective way for integrated humidity sensors with simple structure, high sensitivity and low cost.","PeriodicalId":225534,"journal":{"name":"Photoelectronic Technology Committee Conferences","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2015-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Photoelectronic Technology Committee Conferences","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2179267","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
A novel type of humidity sensor based on the series of micro-rings with the same radius is proposed, and the humidity is measured by detecting the spectrum drift. Experimental results show the sensitivity can achieve about 16pm/10%RH and the sensing range of the humidity sensor is 10~60%RH. The proposed structure will provide an effective way for integrated humidity sensors with simple structure, high sensitivity and low cost.
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