Interface modification of ZnO:B Transparent Conducting Oxides for amorphous silicon solar cells

Chien-Hung Lin, Jia-Hsiang Liu, I. Chan
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Abstract

We addressed the interface problem of a good p-layer contact with boron doped zinc oxide as Transparent Conducting Oxides (TCO). The p-type microcrystalline Silicon (p-μc-Si:H) layer was performed by plasma-enhanced chemical vapor deposition (PECVD) technique as an interface layer between TCO and p-i-n amorphous Si solar cells. The presence of a thin p-type μc-Si:H between ZnO:B and p-a-SiC:H plays a major role by causing an improvement of initial conversion efficiency from 7.1% to 8.2% and the open circuit voltage (Voc) from 0.78V to 0.84V. This high Voc value can be attributed to modification in the current transport in this region due to creation of a potential barrier in the TCO/p-a-SiC:H interface. The short circuit current density Jsc was improved from 13.5 to 15.1mA/cm2 and the quantum efficiency in short region is obviously enhanced.
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ZnO:B透明导电氧化物在非晶硅太阳能电池中的界面改性
我们研究了作为透明导电氧化物(TCO)的掺硼氧化锌与p层良好接触的界面问题。采用等离子体增强化学气相沉积(PECVD)技术制备了p型微晶硅(p-μc-Si:H)层,作为TCO与p-i-n非晶硅太阳电池的界面层。在ZnO:B和p-a-SiC:H之间存在一层薄薄的p型μc-Si:H,使初始转换效率从7.1%提高到8.2%,开路电压(Voc)从0.78V提高到0.84V。这种高Voc值可归因于由于在TCO/p-a-SiC:H界面中产生电位屏障而改变了该区域的电流传输。短路电流密度Jsc由13.5 ma /cm2提高到15.1mA/cm2,短区量子效率明显提高。
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