Apodization for increasing two-point resolution by the sparrow criterion under the partially coherent illumination

T. Asakura, T. Ueno
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引用次数: 15

Abstract

An apodization scheme for increasing the Sparrow resolution limit under the partially coherent illumination is formulated via the calculus of variations. The required pupil functionsa re obtained by solving an homogeneous Fredholm integral equation and evaluated as functions of the coherence condition of illumination and the total light flux passing through the aperture.
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部分相干光照下麻雀判据提高两点分辨力的Apodization
通过变分法,提出了一种提高部分相干光照下麻雀分辨率极限的消光方案。通过求解齐次Fredholm积分方程得到所需的瞳孔函数,并将其作为照明相干性条件和通过孔径的总光通量的函数进行计算。
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