Effect of multiple membranes on capacitive micromachined ultrasonic transducers

Abstract

A 3D model of Capacitive Micromachined Ultrasonic Transducer (CMUT) have been created in COMSOL with two membranes one overlaid on the other. The impact of multiple membranes have been shown on the various parameters like resonant frequency, deflection with applied DC voltage, deflection with applied AC voltage and deflection along frequency. The performance of the device, its sensitivity and the capacity to generate the ultrasonic waves all are associated with the amount of deflection of the membrane. This has been found that the resonant frequency increases with the multiple membranes and the deflection with applied DC and AC voltage decreases as compared to the single membrane. The results provide the researcher the complete impact of the transducer with the multiple membranes in comparison with the single membrane prior to fabrication.