Growth of Sn Whiskers under Net Compressive and Tensile Stress States

E. R. Crandall, G. Flowers, R. Jackson, P. Lall, M. Bozack
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引用次数: 9

Abstract

Studies of tin (Sn) whiskers have emphasized the role of compressive stress as the driving force for whisker production, thought to be a necessary condition for Sn whisker growth. The goal of this work is to characterize Sn whisker growth in film systems having measurable net compressive, zero, and tensile intrinsic stress states. The stress states were generated for the case of ~ 0.2 µm sputtered Sn films on Si (which has no interfacial intermetallic) by controlling the background Ar pressure in the magnetron sputtering system, which produces differing bond energies (and stresses) in the resultant films. Verification of the stress states was accomplished by curvature techniques using stylus profilometry and Stoney's equation. The results show that, after three months of incubation at room temperature, high whisker densities are observed under both tensile (12,000 whiskers/cm2) and compressive (16,000 whiskers/cm2) stress conditions, with a minimum whisker density generated in the zero stress (4,000 whiskers/cm2) condition. It is likely that the zero stress condition produced whiskers due to the difficulty in achieving the narrow range (7-9 mTorr) of background pressures necessary to produce the zero stress state. Relative average whisker lengths were 56µm (tensile stress); 4µm (compressive stress); and 1.5µm (zero stress). Subsequent measurements of whisker density (currently at 96 days of incubation) show no reversals/variations in the stress-density relationship.
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净压缩和拉应力状态下Sn晶须的生长
锡(Sn)晶须的研究强调了压应力作为晶须产生的驱动力的作用,压应力被认为是锡(Sn)晶须生长的必要条件。这项工作的目标是表征具有可测量的净压缩、零和拉伸本征应力状态的薄膜系统中的锡晶须生长。在磁控溅射系统中,通过控制背景Ar压力,在无金属间界面的Si上溅射~ 0.2µm的Sn薄膜,产生了不同的应力状态,从而在薄膜中产生不同的键能(和应力)。应力状态的验证是通过曲率技术完成的,使用触笔轮廓术和斯通尼方程。结果表明,在室温下孵育3个月后,在拉伸(12,000须/cm2)和压缩(16,000须/cm2)应力条件下均可观察到较高的晶须密度,而在零应力(4,000须/cm2)条件下产生的晶须密度最小。零应力条件下产生晶须可能是由于难以达到产生零应力状态所需的背景压力的窄范围(7-9 mTorr)。晶须的相对平均长度为56µm(拉伸应力);4µm(压应力);1.5µm(零应力)。随后的晶须密度测量(目前在96天的孵化)显示应力-密度关系没有逆转/变化。
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