Air Temperature Measurement Using CMOS-SOI-MEMS Sensor Dubbed Digital TMOS

Abstract

: Air temperature is an important meteorological parameter and is used for numerous pur-poses. Air temperature is usually observed using a radiation shield with ventilation, to obtain proper measurements by providing shade from direct solar radiation and increasing the heat exchange between the sensor and atmosphere. In rural areas, such auxiliary equipment is not available and it is still a challenge to obtain the air temperature accurately without aspiration. In this study, we describe a novel qualified CMOS-MEMS low-cost sensor, dubbed Digital TMOS, for remote temperature sensing of air temperature. The novel key ideas of this study are (i) the use of the Digital-TMOS, (ii) a narrow optical band pass filter (4.26 um +/ − 90 nm) corresponding to the CO 2 carbon dioxide absorption band; (iii) measuring simultaneously the weather parameters.