Preparation and Characterization of DC Magnetron Sputtered Thin Films of Titanium, Silver, Gold and Their Compound

A. Amin, Shamik Datta, M. Keniry, A. Touhami, H. Huq
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Abstract

Au and Ag thin films have diverse applications including clean energy generation, storage, biomedical implants, electronic devices and so on. However, developing biocompatible coating on medical implants and surgical instruments is essential for safe medical operations. Here, biocompatible thin films of Titanium (Ti), Silver (Ag), Gold (Au) and Ag-Au compound have been prepared by the DC magnetron sputtering method. To the best of our knowledge, the deposition of Ag-Au compound by sputtering and their biocompatibility test have been performed for the first time in this work. The surface morphology of the as-deposited thin films was characterized by scanning electron microscopy (SEM), where the elemental composition of the films was confirmed by the energy-dispersive X-ray spectroscopy (EDS) and X-Ray photoelectron spectroscopy (XPS) analysis. To investigate the cytotoxic effect of the prepared films, the MTT assay was conducted on human cells. The cytotoxicity test confirmed the biocompatibility of the prepared thin films.
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钛、银、金及其化合物直流磁控溅射薄膜的制备与表征
金和银薄膜具有多种应用,包括清洁能源发电,存储,生物医学植入物,电子器件等。然而,在医疗植入物和手术器械上开发生物相容性涂层对于安全的医疗操作至关重要。本文采用直流磁控溅射法制备了钛(Ti)、银(Ag)、金(Au)和Ag-Au化合物的生物相容性薄膜。据我们所知,本工作首次进行了Ag-Au化合物的溅射沉积及其生物相容性测试。利用扫描电子显微镜(SEM)对薄膜的表面形貌进行了表征,并用x射线能谱(EDS)和x射线光电子能谱(XPS)分析了薄膜的元素组成。为了研究制备的膜的细胞毒性作用,对人细胞进行了MTT试验。细胞毒性试验证实了所制备薄膜的生物相容性。
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