Aspheric surface polishing with orthogonal velocity polishing tool

Zhimin Rao, Haitao Liu, Jieli Wu, Qiang Chen, Dailu Wang
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Abstract

An efficient orthogonal velocity polishing tool (OVPT) was developed. The OVPT was installed on the end flange of an industry robot. The movement range of the industry robot reaches φ 1000 millimeter. The robot OVPT is a highly efficiency processing method for aspheric precision optics manufacturing. In this paper, a 360 mm diameter fused silica parabolic mirror was polished by the robot OVPT. The convergence of OVPT based on an industry robot is outstanding. After 4 times of polishing, a final surface error RMS 16.6nm was achieved, and the initial surface error RMS was 69.5nm. A polished surface roughness Ra 1.5nm was achieved by robot OVPT.
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用正交速度抛光工具对非球面进行抛光
研制了一种高效正交速度抛光工具(OVPT)。OVPT安装在工业机器人的端缘上。工业机器人的运动范围达到φ 1000毫米。机器人OVPT是一种高效的非球面精密光学加工方法。利用OVPT机器人对直径为360 mm的熔融石英抛物面镜进行抛光。基于工业机器人的OVPT收敛性突出。经过4次抛光,最终表面误差RMS为16.6nm,初始表面误差RMS为69.5nm。OVPT机器人抛光表面粗糙度Ra为1.5nm。
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