Zhimin Rao, Haitao Liu, Jieli Wu, Qiang Chen, Dailu Wang
{"title":"Aspheric surface polishing with orthogonal velocity polishing tool","authors":"Zhimin Rao, Haitao Liu, Jieli Wu, Qiang Chen, Dailu Wang","doi":"10.1117/12.2604036","DOIUrl":null,"url":null,"abstract":"An efficient orthogonal velocity polishing tool (OVPT) was developed. The OVPT was installed on the end flange of an industry robot. The movement range of the industry robot reaches φ 1000 millimeter. The robot OVPT is a highly efficiency processing method for aspheric precision optics manufacturing. In this paper, a 360 mm diameter fused silica parabolic mirror was polished by the robot OVPT. The convergence of OVPT based on an industry robot is outstanding. After 4 times of polishing, a final surface error RMS 16.6nm was achieved, and the initial surface error RMS was 69.5nm. A polished surface roughness Ra 1.5nm was achieved by robot OVPT.","PeriodicalId":236529,"journal":{"name":"International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT)","volume":"14 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2021-12-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2604036","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
An efficient orthogonal velocity polishing tool (OVPT) was developed. The OVPT was installed on the end flange of an industry robot. The movement range of the industry robot reaches φ 1000 millimeter. The robot OVPT is a highly efficiency processing method for aspheric precision optics manufacturing. In this paper, a 360 mm diameter fused silica parabolic mirror was polished by the robot OVPT. The convergence of OVPT based on an industry robot is outstanding. After 4 times of polishing, a final surface error RMS 16.6nm was achieved, and the initial surface error RMS was 69.5nm. A polished surface roughness Ra 1.5nm was achieved by robot OVPT.
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