In-situ measurement technology of robotic polishing system

Abstract

With vigorous development of modern optical manufacturing in the direction of intelligence and precision, coupled with the continuous increase in the diameter of optical components and continuous improvement of precision requirements, industrial robot polishing technology has a wide range of application scenarios and broad development space in the field of optical manufacturing. The integration of processing and measurement is a key technology to improve the reliability and intelligence of precision manufacturing. Therefore, the research and development of in-situ measurement technology has become an important trend in the field of optical manufacturing. A measurement method based on deflectometry is a type of surface gradient measurement method that has been proposed and developed in recent years. Due to the advantages of superior simplicity, stability, and high dynamic range, it is promising for the in-situ measurement of optical surfaces. Based on monoscopic deflectometry, this paper develops an in-situ measurement device for industrial robot polishing system. The key problems of phase decoupling and optical path correction of transparent components are being researched, and high-precision double-surface measurement of transparent optical elements is realized, which is of great significance to the intelligent manufacturing of key optical elements.