{"title":"Scanning electron microscopy","authors":"L. Lemgruber, R. Ion","doi":"10.1088/978-0-7503-3059-6CH26","DOIUrl":null,"url":null,"abstract":"Scanning Electron Microscopy Ludwig Reimer 2013-11-11 Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.","PeriodicalId":166089,"journal":{"name":"Imaging Modalities for Biological and Preclinical Research: A Compendium, Volume 1: Part I: Ex vivo biological imaging","volume":" 20","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2021-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"14","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Imaging Modalities for Biological and Preclinical Research: A Compendium, Volume 1: Part I: Ex vivo biological imaging","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1088/978-0-7503-3059-6CH26","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 14
Abstract
Scanning Electron Microscopy Ludwig Reimer 2013-11-11 Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.
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