NANOFABRICATION FOR PHOTONIC APPLICATIONS

Abstract

Materials with nanoscale dimensions have unique optical properties, which have been extensively explored and implemented for a variety of functionalized photonic structures and devices. In this paper, the nanofabrication processes for photonic applications are reviewed. The nanofabrication methods can be divided into two major categories: top-down and bottom-up. The main techniques used in each method are discussed in terms of its process capabilities, advantages, limitations, and applications. The cases which involve the combination of top-down and bottom-up approaches are also illustrated.