In-situ Optical Characterisation of Integrated Photonic Devices During Transfer Printing

Sean P. Bommer, Changyu Hu, B. Guilhabert, M. Dawson, M. Strain
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Abstract

Transfer printing enables back-end assembly of opto-electronic devices with the nanoscale accuracy necessary for waveguide device placement. Even with high positional control it is still common for critical devices to require rework due to small fabrication inconsistencies between devices. An optical module has been developed that allows active monitoring of devices during printing that enables consistent performance across printed components.
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转移印刷过程中集成光子器件的原位光学特性
转移印刷使光电器件的后端组装具有波导器件放置所需的纳米级精度。即使具有高位置控制,由于设备之间的小制造不一致,关键设备需要返工仍然是常见的。已经开发出一种光学模块,可以在打印过程中对设备进行主动监控,从而使打印组件的性能保持一致。
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