Development and Analysis of In GaAs Nanowire Junctionless MOSFET with 10 nm gate length

Jeevanarao Batakala, R. Dhar
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Abstract

The device performance of nanowire junctionless MOSFET (NW-JL-MOSFET) with InGaAs as core material in the sub-10 nm regime is examined by a device simulator, namely ATLAS. The focus is on gate-all-around nanowires with InGaAs core. These devices are further examined by adding gate-stack (high-k dielectric + oxide) method. It is observed that optimal selection of structure parameters of InGaAs NW-JL-MOSFET attains higher drain current and optimal performance. This proposed architecture also provides better switching speed of the structure. The gate dielectric material optimization of the structure is attained via broad device simulation. In this manuscript, a literature is carried for the short channel effects like subthreshold swing, Ion/Ioff ratio, Threshold voltage and drain induced barrier lowering (DIBL). The InGaAs device has a better threshold voltage and Ion/Ioff ratio, according to simulation data.
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栅极长度为10nm的In GaAs纳米线无结MOSFET的研制与分析
利用器件模拟器ATLAS测试了以InGaAs为芯材的纳米线无结MOSFET (NW-JL-MOSFET)在亚10nm范围内的器件性能。重点是具有InGaAs核心的栅极全能纳米线。通过添加栅极堆(高k介电介质+氧化物)方法对这些器件进行了进一步的检测。通过对InGaAs NW-JL-MOSFET结构参数的优化选择,可以获得更高的漏极电流和最优的性能。该架构还提供了更好的结构切换速度。通过广泛的器件模拟,实现了栅极介质材料的结构优化。本文对亚阈值振荡、离子/开关比、阈值电压和漏极势垒降低(DIBL)等短通道效应进行了研究。仿真数据表明,InGaAs器件具有更好的阈值电压和离子/开关比。
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