The Use of High Resolution Phase-Measuring Interferometry in the Figuring of Large Symmetric and Asymmetric Aspheres

D. S. Anderson
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Abstract

In-situ testing of large optics greatly increases the speed and accuracy of the figuring process. Rapid test data turnaround and precise contour map displays allow an optician using traditional polishing techniqes to progress rapidly to final figure. At the Optical Sciences Center we have developed a high resolution phase-measuring interferometer that we used during the final figuring stages of a 20-in. diameter, 97-in. focal length off-axis parabola and a 72-in. diameter, f/2.7 symmetric lightweight parabola. Both mirrors were tested and figured in-situ, the off-axis mirror on the table of the swing-arm generator and the 72-in. mirror in a test tower in which the mirror was supported on a rotary table equipped with a polishing arm. High resolution phase maps of each surface were obtained with resolutions of approximately 9mm/pixel and 2mm/pixel on the 72- and 20-in. mirrors, respectively. The phase contour maps were displayed on a video monitor and photographed with a 35mm camera on Tri-X film. The negatives were mounted directly as slides into circular slide mounts and displayed with a slide projector directly onto the slurry coated mirror. The optician then worked the high zones and patches using traditional polishing methods. The circular slide mounts allowed for easy alignment of the contour maps with the fiducialized mirrors. Test turnaround time from one polishing run to the next was about 2 hours allowing for rapid convergence to the final figure.
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高分辨率相位测量干涉法在大型对称和非对称球面成像中的应用
大型光学元件的原位测试大大提高了计算过程的速度和精度。快速的测试数据周转和精确的等高线地图显示允许使用传统抛光技术的光学师快速进展到最终图形。在光学科学中心,我们开发了一种高分辨率相位测量干涉仪,我们在20英寸的最后计算阶段使用。直径,97年。焦距离轴抛物线和72英寸。直径,f/2.7对称轻质抛物线。两个反射镜都在现场进行了测试和计算,离轴反射镜在摆臂发电机的工作台上,72-in。镜子在测试塔中,镜子被支撑在配有抛光臂的转台上。每个表面的高分辨率相位图在72英寸和20英寸上的分辨率分别约为9mm/像素和2mm/像素。分别反映。相位等高线图显示在视频监视器上,并用Tri-X胶片上的35mm相机拍摄。底片直接作为载玻片安装到圆形载玻片上,用幻灯机直接显示在涂有浆液的镜子上。然后,验光师使用传统的抛光方法对高区域和补丁进行加工。圆形滑动安装允许容易对准等高线地图与基准化的镜子。从一次润色到下一次润色的测试周转时间大约是2个小时,允许快速收敛到最终图形。
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