Design, fabrication and characterization of photonic crystal based taper

W. Dawidowski, J. Beetz, M. Kamp, S. Patela
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Abstract

Efficient tapers that match the compact modes of photonic crystal (PhC) waveguides to the larger modes of ridge waveguides or optical fibers are key building blocks for matching PhC based devices to standard optics. We have investigated the design, fabrication and measurement of PhC tapers and waveguides. The photonic crystal structures are all based on a triangular lattice of air holes in an AlGaAs/GaAs slab heterostructure. High resolution electron beam lithography together with a combination of dry and wet etching was used to fabricate the structures. The transmission measurements of the waveguides and tapers was carried out by the end ¿ fire method. A tunable semiconductor laser with a tuning range from 1240 nm to 1347 nm was used as a light source. The TE polarized light was launched into the waveguide from a polarization maintaining lensed fiber. The losses were determined by two methods that do not depend on a knowledge of the coupling efficiency between the fiber and the waveguide. The first (Hakki ¿ Paoli) is based on an analysis of the fringe contrast of the transmission spectrum. The other approach uses a Fourier analysis of the transmission spectrum.
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基于光子晶体锥度的设计、制造与表征
将光子晶体(PhC)波导的紧凑模式与脊波导或光纤的较大模式相匹配的高效锥体是将基于PhC的器件与标准光学器件相匹配的关键组成部分。我们研究了PhC锥和波导的设计、制造和测量。这些光子晶体结构都是基于AlGaAs/GaAs板异质结构中气孔的三角形晶格。采用高分辨率电子束光刻和干湿蚀刻相结合的方法来制造该结构。采用端火法对波导和圆锥的透射率进行了测量。采用调谐范围为1240 ~ 1347 nm的可调谐半导体激光器作为光源。TE偏振光从保持偏振的透镜光纤发射到波导中。损耗由两种方法确定,这两种方法不依赖于光纤和波导之间耦合效率的知识。第一种(Hakki¿Paoli)是基于透射光谱的条纹对比分析。另一种方法使用传输频谱的傅立叶分析。
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