Two-Photon Polymerization-based Direct Laser Writing and Characterization of Micro-Lenses for Optical Interconnect Applications

K. Vanmol, A. Kandeel, G. Y. Belay, H. Thienpont, H. Ottevaere, J. Van Erps
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引用次数: 1

Abstract

We present the characterization of micro-lenses that are fabricated with the technology of two-photon polymerization (2PP)-based direct laser writing. We fabricate multiple lenses with different exposure parameters, after which we use interferometric characterization tools to investigate their geometry and optical performance to optimize the fabrication strategy.
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基于双光子聚合的微透镜直接激光书写与表征
本文介绍了用双光子聚合(2PP)激光直接书写技术制备的微透镜的特性。我们制作了多个具有不同曝光参数的透镜,然后使用干涉表征工具研究了它们的几何形状和光学性能,以优化制作策略。
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