Laser Induced Thermal Stress in Optical Thin Films

A. Firth, U. Srinivasan
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引用次数: 1

Abstract

Thermal stress of optical thin film materials SiO2, HfO2, Al2O3, TiO2, and MgF2 exposed to laser pulse is simulated using 2D finite element method. Thermal stress is compressive and MgF2 film has the least value.
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光学薄膜中激光诱导的热应力
采用二维有限元法模拟了光学薄膜材料SiO2、HfO2、Al2O3、TiO2和MgF2在激光脉冲作用下的热应力。热应力为压缩应力,MgF2薄膜的热应力最小。
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