M. Maricaru, F. Constantinescu, M. Nitescu, A. Florea
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引用次数: 1
Abstract
A linear electromechanical field model of an AlN piezoelectric resonator is developed in this paper. The values of the material parameters on the longitudinal direction have been validated by comparing the FEM results with the Mason multilayer model results and with small signal measurements. Various models for FEM analysis including transversal wave propagations are considered.
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