DISTRIBUTION OF IMPURITY ATOMS BY THE VOLUME OF MICROINCUTIONS IN SAMPLES n-Si

S. Zainabidinov, N. Turgunov, Sh. K. Akbarov, E. Berkinov, D.Kh. Mamazhonova
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Abstract

The paper considers the structural structure o f nickel impurity microinclusions in silicon, form ed during diffusion alloying at a temperature o f T = 1523 K. Using microprobe analysis, images o f nickel impurity microinclusions were obtained, and their chemical compositions were determined. The distribution o f Ni atoms and some technological impurities such as Fe and Cr over the volume o f multilayer microinclusions was revealed, according to which the maximum percentage o f impurity atoms is in its central part.
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氮硅样品中杂质原子的微感应体积分布
本文研究了硅中镍杂质微夹杂物在1523 K扩散合金化过程中形成的结构结构。采用探针分析方法,获得了镍杂质微夹杂物的图像,并对其化学成分进行了测定。揭示了Ni原子和工艺杂质(Fe、Cr)在多层微夹杂体体积上的分布规律,杂质原子占比最大的是多层微夹杂体的中心部分。
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