{"title":"Low fluence femtosecond laser exposure for fast 3D glass micromachining","authors":"E. Casamenti, Sacha Pollonghini, Y. Bellouard","doi":"10.1117/12.2612155","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":159000,"journal":{"name":"Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XXII","volume":"88 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XXII","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2612155","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}