{"title":"Dynamical focusing electro-optical sensor system for measuring surface contours","authors":"R. Gu, C. Xu, L. Lio, G. Shen","doi":"10.1117/12.150666","DOIUrl":null,"url":null,"abstract":"A test unit is described which includes an automatic focusing device and a displacement sensor for lens movement. The resolution of the unit is 20 nm in the range of +/- 40 micrometers . In addition, a technique for ensuring the focal spot using the character of the laser diode is presented. This measurement principle can be widely used in the areas of precision manufacture, optical industry, and soft materials testing.","PeriodicalId":212484,"journal":{"name":"Optical Storage and Information Data Storage","volume":"62 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1993-08-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optical Storage and Information Data Storage","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.150666","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
A test unit is described which includes an automatic focusing device and a displacement sensor for lens movement. The resolution of the unit is 20 nm in the range of +/- 40 micrometers . In addition, a technique for ensuring the focal spot using the character of the laser diode is presented. This measurement principle can be widely used in the areas of precision manufacture, optical industry, and soft materials testing.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
