Shi Cheng, A. Rydberg, P. Hallbjorner, L. Pettersson, Michael Salter, D. Platt
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引用次数: 5
Abstract
This paper presents a millimeter-wave tapered slot antenna (TSA) for integration on a 325 μm thick low resistivity silicon substrate, using micromachining techniques. By suspending the radiator on a 5.5 mm x 1.5 mm large benzocyclobutene (BCB) membrane, good antenna performance is achieved at millimeter-wave frequencies. Port impedance and radiation patterns are studied numerically and experimentally. Measurements indicate that this antenna features good impedance matching (S11 ≪ −10 dB) and a gain of ≫ 4.6 dBi from 75 to 110 GHz. The measured results are in good agreement with numerical simulations.
本文提出了一种毫米波锥形缝隙天线(TSA)，该天线采用微加工技术集成在325 μm厚的低电阻硅衬底上。通过将散热器悬挂在5.5 mm x 1.5 mm的大苯并环丁烯(BCB)膜上，可以在毫米波频率下实现良好的天线性能。对端口阻抗和辐射模式进行了数值和实验研究。测量结果表明，该天线具有良好的阻抗匹配(S11≪−10 dB)，在75至110 GHz范围内的增益为4.6 dBi。实测结果与数值模拟结果吻合较好。
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