{"title":"Fast field solvers for thermal and electrostatic analysis","authors":"V. Székely, M. Rencz","doi":"10.1109/DATE.1998.655907","DOIUrl":null,"url":null,"abstract":"Two different field solver tools have been developed in order to facilitate fast thermal and electro-static simulation of microsystem elements. The /spl mu/S-THERMANAL program is capable of the fast steady-state and dynamic simulation of suspended multilayered microsystem structures. The 2D-SUNRED program is the first version of a general field solver based an an original method, the successive node reduction. SUNRED offers a very fast and accurate substitute of FEM programs for the solution of the Poisson equation. Steady-state and dynamic simulation examples demonstrate the usability of the novel tool.","PeriodicalId":179207,"journal":{"name":"Proceedings Design, Automation and Test in Europe","volume":"7 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1998-02-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"21","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings Design, Automation and Test in Europe","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/DATE.1998.655907","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 21
Abstract
Two different field solver tools have been developed in order to facilitate fast thermal and electro-static simulation of microsystem elements. The /spl mu/S-THERMANAL program is capable of the fast steady-state and dynamic simulation of suspended multilayered microsystem structures. The 2D-SUNRED program is the first version of a general field solver based an an original method, the successive node reduction. SUNRED offers a very fast and accurate substitute of FEM programs for the solution of the Poisson equation. Steady-state and dynamic simulation examples demonstrate the usability of the novel tool.
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